SMC High Vacuum Angle Valve
Product Code: XLA-16G-2-XF1A...
Available to Order
tech sheet
Details
Series
XL2
Actuation
Single acting
Feature
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Angle
Angle valve
Seal Type
Bellows Seal
Manufacturer
SMC
Operation
Normally Closed
Flange Specification
KF NW
Brand
SMC
Seal Material
FKM
Application
High vacuum applications requiring minimal contamination and corrosion resistance
Body Material
Aluminium
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Operation
Actuator Working Temperature
Application
Width mm
Feature
Height mm
Length mm
Actuation
Valve Material
Ambient Temperature
Angle
List Price
Normally Closed, Single Acting, Bellows Seal
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
Normally Closed
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171
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
66
98
Single acting
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Available to Order
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Normally Closed
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Available to Order
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121
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48
74
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Available to Order
Normally Closed Bellows Seal
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High Vacuum Angle Valve
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Available to Order
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Available to Order
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185
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79
110
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Available to Order
Normally Closed Bellows Seal
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Available to Order
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121
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48
77
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
48
74
Normally Closed
Aluminium
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Available to Order
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Available to Order
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171
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66
104
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Available to Order
Normally Closed Bellows Seal
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High Vacuum
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5 to 60°C
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
Normally Closed Bellows Seal
–
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
5 to 60°C
–
Available to Order
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5 to 60°C
High Vacuum
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Normally Closed
Available to Order
Normally Closed
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High Vacuum
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Available to Order