SMC High Vacuum Angle Valve
Product Code: XLA-63-2M9//...
Available to Order
tech sheet
Details
Series
XL2
Actuator Working Temperature
5 to 60°C
Manufacturer
SMC
Brand
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Operation
Normally Closed, Single Acting, Bellows Seal
Seal Material
FKM
Body Material
Aluminium
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Width mm
Feature
Actuation
Height mm
Operation
Length mm
Seal Type
Flange Specification
Angle
Application
Valve Material
Ambient Temperature
List Price
171
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Single acting
66
Normally Closed
98
Bellows Seal
–
–
–
–
–
Available to Order
–
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
–
Normally Closed
–
Bellows Seal
KF NW
Angle valve
High vacuum applications requiring minimal contamination and corrosion resistance
–
–
Available to Order
–
–
Normally Closed
–
–
–
–
–
–
–
–
–
Available to Order
121
–
–
48
–
74
–
–
–
–
–
–
Available to Order
–
–
–
–
Normally Closed Bellows Seal
–
–
–
–
High Vacuum Angle Valve
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
185
–
–
79
–
110
–
–
–
–
–
–
Available to Order
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order
121
–
–
48
–
77
–
–
–
–
–
–
Available to Order
121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed
48
–
74
Bellows Seal
–
–
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
171
–
–
66
–
104
–
–
–
–
–
–
Available to Order
–
–
–
–
Normally Closed Bellows Seal
–
–
–
–
High Vacuum
–
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
Normally Closed Bellows Seal
–
–
–
–
High Vacuum
–
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
Normally Closed
High Vacuum
–
–
Available to Order
–
–
–
–
Normally Closed
–
Bellows Seal
–
–
High Vacuum
–
–
Available to Order