SMC High Vacuum Angle Valve
Product Code: XLA-50G-2M9//...
Available to Order
tech sheet
Details
Series
XL2
Actuator Working Temperature
5 to 60°C
Application
High Vacuum
Manufacturer
SMC
Brand
SMC
Seal Material
FKM
Body Material
Aluminium
Angle
Normally Closed
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Operation
Application
Width mm
Feature
Actuation
Height mm
Length mm
Seal Type
Flange Specification
Angle
Valve Material
Ambient Temperature
List Price
Normally Closed, Single Acting, Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
–
–
–
–
–
Available to Order
Normally Closed
–
171
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Single acting
66
98
Bellows Seal
–
–
–
–
Available to Order
Normally Closed
High vacuum applications requiring minimal contamination and corrosion resistance
–
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
–
–
Bellows Seal
KF NW
Angle valve
–
–
Available to Order
–
–
–
–
Normally Closed
–
–
–
–
–
–
–
Available to Order
–
–
121
–
–
48
74
–
–
–
–
–
Available to Order
Normally Closed Bellows Seal
High Vacuum Angle Valve
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
185
–
–
79
110
–
–
–
–
–
Available to Order
Normally Closed Bellows Seal
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
–
–
–
Available to Order
–
–
121
–
–
48
77
–
–
–
–
–
Available to Order
–
High vacuum angle valve for semiconductor and vacuum applications
121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed
48
74
Bellows Seal
–
–
Aluminium
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
171
–
–
66
104
–
–
–
–
–
Available to Order
Normally Closed Bellows Seal
High Vacuum
–
–
–
–
–
–
–
–
–
5 to 60°C
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
Normally Closed Bellows Seal
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
–
–
5 to 60°C
Available to Order
Normally Closed
High Vacuum
–
–
–
–
–
Bellows Seal
–
–
–
–
Available to Order