SMC High Vacuum Angle Valve
Product Code: XLA-25-2...
Available to Order
tech sheet
Details
Series
XL2
Valve Material
Aluminium
Length mm
74
Width mm
121
Actuation
Normally Closed
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Seal Type
Bellows Seal
Manufacturer
SMC
Brand
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Seal Material
FKM
Body Material
Aluminium
Height mm
48
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Operation
Actuator Working Temperature
Width mm
Feature
Actuation
Height mm
Length mm
Flange Specification
Angle
Application
Ambient Temperature
List Price
Normally Closed, Single Acting, Bellows Seal
5 to 60°C
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High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
Normally Closed
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171
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Single acting
66
98
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–
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–
Available to Order
Normally Closed
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Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
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KF NW
Angle valve
High vacuum applications requiring minimal contamination and corrosion resistance
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Available to Order
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Normally Closed
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Available to Order
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121
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48
74
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Available to Order
Normally Closed Bellows Seal
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High Vacuum Angle Valve
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Available to Order
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Available to Order
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185
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79
110
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Available to Order
Normally Closed Bellows Seal
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Available to Order
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121
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48
77
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Available to Order
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Available to Order
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171
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66
104
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Available to Order
Normally Closed Bellows Seal
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High Vacuum
5 to 60°C
Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
Normally Closed Bellows Seal
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
High Vacuum
5 to 60°C
Available to Order
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5 to 60°C
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Normally Closed
High Vacuum
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Available to Order
Normally Closed
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High Vacuum
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Available to Order