SMC High Vacuum Angle Valve
Product Code: XLA-40-2M9//...
Available to Order
tech sheet
Details
Series
XL2
Actuation
Single acting
Width mm
171
Feature
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Seal Type
Bellows Seal
Manufacturer
SMC
Height mm
66
Operation
Normally Closed
Brand
SMC
Length mm
98
Seal Material
FKM
Body Material
Aluminium
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Operation
Actuator Working Temperature
Application
Flange Specification
Angle
Feature
Actuation
Width mm
Length mm
Height mm
Valve Material
Ambient Temperature
List Price
Normally Closed, Single Acting, Bellows Seal
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
Normally Closed
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High vacuum applications requiring minimal contamination and corrosion resistance
KF NW
Angle valve
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
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Available to Order
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Normally Closed
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Available to Order
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121
74
48
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Available to Order
Normally Closed Bellows Seal
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High Vacuum Angle Valve
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Available to Order
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Available to Order
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185
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79
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Available to Order
Normally Closed Bellows Seal
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Available to Order
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121
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48
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed
121
74
48
Aluminium
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Available to Order
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Available to Order
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171
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66
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Available to Order
Normally Closed Bellows Seal
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High Vacuum
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5 to 60°C
Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
Normally Closed Bellows Seal
–
High Vacuum
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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5 to 60°C
Available to Order
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5 to 60°C
High Vacuum
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Normally Closed
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Available to Order
Normally Closed
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High Vacuum
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Available to Order