SMC High Vacuum Angle Valve
Product Code: XLA-16G-2M9//...
Available to Order
tech sheet
Details
Series
XL2
Actuation
Single acting
Ambient Temperature
5 to 60°C
Valve Material
Aluminium
Angle
Angle valve
Width mm
108
Height mm
38
Manufacturer
SMC
Feature
Bellows seal
Operation
Normally Closed
Brand
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Seal Material
FKM
Body Material
Aluminium
Length mm
60
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Operation
Actuator Working Temperature
Width mm
Feature
Height mm
Length mm
Seal Type
Flange Specification
Application
Actuation
Angle
List Price
Normally Closed, Single Acting, Bellows Seal
5 to 60°C
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High vacuum angle valve for semiconductor and vacuum applications
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–
Available to Order
Normally Closed
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171
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
66
98
Bellows Seal
–
–
Single acting
–
Available to Order
Normally Closed
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–
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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–
Bellows Seal
KF NW
High vacuum applications requiring minimal contamination and corrosion resistance
Single acting
Angle valve
Available to Order
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Normally Closed
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Available to Order
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121
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48
74
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Available to Order
Normally Closed Bellows Seal
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High Vacuum Angle Valve
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Available to Order
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Available to Order
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185
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79
110
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Available to Order
Normally Closed Bellows Seal
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
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Available to Order
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121
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48
77
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Available to Order
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121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
48
74
Bellows Seal
–
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
–
Available to Order
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Available to Order
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171
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66
104
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Available to Order
Normally Closed Bellows Seal
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High Vacuum
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Available to Order
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Available to Order
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Available to Order
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Available to Order
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Available to Order
Normally Closed Bellows Seal
–
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
High Vacuum
–
–
Available to Order
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5 to 60°C
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High Vacuum
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Normally Closed
Available to Order