SMC High Vacuum Angle Valve
Product Code: XLA-50-2M9//XF1AManufacturer Code: XLA-50-2M9//-XF1A...
Available to Order
tech sheet
Details
Manufacturer
SMC
Brand
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Operation
Seal Material
Body Material
Series
Actuator Working Temperature
Application
Width mm
Feature
Actuation
Height mm
Length mm
Seal Type
Flange Specification
Angle
Valve Material
Ambient Temperature
List Price
Normally Closed, Single Acting, Bellows Seal
FKM
Aluminium
XL2
5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
Normally Closed
FKM
Aluminium
XL2
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–
171
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Single acting
66
98
Bellows Seal
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–
–
–
Available to Order
Normally Closed
FKM
Aluminium
XL2
–
High vacuum applications requiring minimal contamination and corrosion resistance
–
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
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–
Bellows Seal
KF NW
Angle valve
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Available to Order
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FKM
Aluminium
XL2
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–
–
–
Normally Closed
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–
Available to Order
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FKM
Aluminium
XL2
–
–
121
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–
48
74
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–
–
–
Available to Order
Normally Closed Bellows Seal
FKM
Aluminium
XL2
–
High Vacuum Angle Valve
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Available to Order
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Available to Order
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FKM
Aluminium
XL2
–
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185
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–
79
110
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–
–
–
–
Available to Order
Normally Closed Bellows Seal
FKM
Aluminium
XL2
–
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
–
–
–
Available to Order
–
FKM
Aluminium
XL2
–
–
121
–
–
48
77
–
–
–
–
–
Available to Order
–
FKM
Aluminium
XL2
–
High vacuum angle valve for semiconductor and vacuum applications
121
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed
48
74
Bellows Seal
–
–
Aluminium
–
Available to Order
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Available to Order
–
FKM
Aluminium
XL2
–
–
171
–
–
66
104
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–
–
–
–
Available to Order
Normally Closed Bellows Seal
FKM
Aluminium
XL2
–
High Vacuum
–
–
–
–
–
–
–
–
–
5 to 60°C
Available to Order
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Available to Order
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Available to Order
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Available to Order
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–
–
–
–
–
–
Available to Order
Normally Closed Bellows Seal
FKM
Aluminium
XL2
–
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
–
–
–
–
–
5 to 60°C
Available to Order
–
FKM
Aluminium
XL2
5 to 60°C
High Vacuum
–
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–
–
–
–
–
Normally Closed
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Available to Order